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Nanosecond Laser Scribing Equipment
Laser Scribing Series
Nanosecond laser is used for precise dicing of GPP wafers.
Product Data
Product advantages:
The cutting line width is narrow (taking ultraviolet dicing as an example: including HAZ ≤ 30 ± 5 μm) , small edge collapse ≤ 10 μm
High processing efficiency
UPH ≥ 15 (take 40mil, 5-inch GPP wafer as an example, including automatic loading and unloading)
Good processing stability
Nanosecond laser has high power stability and good beam quality (M ² < 1.5)
Sample display:
Front positioning, front cutting: 4-inch flat wafer, grain
Front positioning, back cutting: 5-inch GPP wafer
Item
Main parameters
Model
LUD3200
LUD3210
Laser
Center wavelength
~355nm
~ 1064 nm
Cutting head
Self-developed
Self-developed
Performance
Effective working stroke
200x300mm(optional)、 DD motor
200x300mm(optional)、 DD motor
Repetitive positioning accuracy
±2μm 、 ±5arc sec
±2μm 、 ±5arc sec
Visual positioning
Front positioning, front cutting
Front positioning, back cutting
Scribe line width
≤30±5μm
≤ 4 0±5μm
Others
Power supply specification
220V/50Hz/3.5kW
220V/50Hz/3.5kW
Overall size
1 1 50mm* 8 00mm* 17 00mm
1 1 50mm* 8 00mm* 17 00mm
Weight
1 0 00 Kg
1 0 00 Kg
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