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Picosecond Laser Scribing Equipment
Laser Scribing Series
Ultra violet picosecond laser is used for precision half cutting or full cutting of silicon and compound semiconductor wafers.
Product Data
Product advantages :
Cutting line width is narrow (taking ultraviolet collimation as an example, cutting line width + HAZ ≤ 20 ± 5 μ m) Small edge collapse (≤ 10 μ m)
UPH ≥ 10 (UV galvanometer: take 3-inch double mesa silicon diode wafer as an example, including automatic alignment time)
The laser has high pulse stability (≤ 2% RMS) and high beam quality (M ² ≤1.2)
Sample display:
Cutting front - 3-inch double mesa diode wafer laser full cutting; Grain size: 300 * 300 μm, Wafer thickness 130 μm, Cutting channel thickness 30 μm.
Cutting back - 3-inch double mesa diode wafer laser full cutting; Grain size: 300 * 300 μm, Wafer thickness 130 μm, Cutting channel thickness 30 μm.
Item
Main parameters
Model
LUD3200
LUD3210
Laser
Center wavelength
~355nm
~ 355 nm
Cutting head
Laser scanning head
Laser collimator
Performance
Effective working stroke
200x300mm(optional)、 DD motor
200x300mm(optional)、 DD motor
Repetitive positioning accuracy
±2μm 、 ±5arc sec
±2μm 、 ±5arc sec
Visual positioning
Front positioning, front cutting
Front positioning, front cutting
Scribe line width
≤30±5μm
≤ 2 0±5μm
Others
Power supply specification
220V/50Hz/3.5kW
220V/50Hz/3.5kW
Overall size
15 0 0mm* 17 00mm* 20 00mm
15 0 0mm* 17 00mm* 20 00mm
Weight
1 5 00 Kg
1 5 00 Kg
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